The miniaturization of the metal-oxide-semiconductor field-effect transistor, or MOSFET, from the micrometer scale in the 1960s to the nanometer as of today, is because the more mature the chip is, it provides much faster information processing and less power-hungry.
Quantum tunneling is the phenomenon when electrons are able to penetrate barriers. Now, when the distance between different transistor regions is thinner, electrons can barrel easily right through them.
As a result of this, too much current will flow across the channel even though the transistor is off. When a transistor is “OFF”, no current should flow at all. In other too much miniaturization of MOSFET can cause leakage of current flow.