Question

Name three possible sources of signals with the SEM. Differentiate between elastic and inelastic scattering of electrons.

Short answer

There are three possible signal sources:

1. Backscattered electrons

2. Secondary electrons

3. X-ray photons.

Step-by-step solution

Introduction

The scanning electron microscope (SEM) generates a variety of signals at the surface of solid specimens using a focused beam of high-energy electrons.

SEM Concept 

With the SEM (scanning electron microscope), there are three possible signal sources:

1. Electrons that have been backscattered

2. Electrons in the secondary state

3. X-ray photons are the third type of photon.

The following is a list of the differences between elastic and inelastic electron scattering:

The elastic scattering of electrons causes the scattered electron to change direction. During the elastic scattering of electrons, no energy is lost. Inelastic scattering of electrons, on the other hand, results in the transfer of all or part of the energy of the incoming electron.